d Digital Veeco i Instruments Metrology Group Support Note 31 6 Revision A NanoLithography 316 1 Overview This support note details NanoLithography theory NanoScript syntax for performing lithography commands and procedures to test build and run NanoLithography programs Refer to the following sections for using your NanoLithography Package e New NanoLithography Package Section 316 2 on Page 2 e Package Contents Section 316 2 1 on Page 2 e Terms and Defin
Reports in Electron P hysics 2000 21 Espoo 2000 Lithography in Experimental Environment Anssi Hovinen Alexei Malinin Antti Lipsanen Reports in Electron P hysics 2000 21 Espoo 2000 Lithography in Experimental Environment Anssi Hovinen Alexei Malinin Antti Lipsanen Helsinki University of Technology Department of Electrical and Communications Engineering Electron Physics Laboratory Teknillinen Korkeakoulu S hk ja tietoliikennetekniikan osasto Elektronifysiika
IM THERMOMICROSCOPES Nanolithography for Explorer v 1 0 Software User s Manual ThermoMicroscopes 1171 Borregas Avenue Sunnyvale California 94089 Tel 408 747 1600 Fax 408 747 1601 Binary License Agreement You the Licensee assume responsibility for the selection of the program to achieve your intended results and for the installa tion use and results obtained from the program IF YOU USE COPY MODIFY OR TRANSFER THE PROGRAM OR ANY COPY MODIF
SPIE Handbook of Microlithography Micromachining and Microfabrication Volume 1 Microlithography Chapter 2 E Beam Lithography by Mark A McCord Stanford University Michael J Rooks Cornell University Table of Contents 2 1 Introduction 2 1 1 Definition and historical perspective 2 1 2 Applications 2 1 3 Alternative techniques 2 2 Elements of electron optics 2 2 1 Introduction 2 2 2 Electron sources 2 2 3 Electron lenses 2 2 4 Other electron optical element