| # | Title | Type | Language | |||||||||||
| 1. | Microlithography Chapter 2 E Beam Lithography b SPIE Handbook of Microlithography Micromachining and Microfabrication Volume 1 Microlithography Chapter 2 E Beam Lithography by Mark A McCord Stanford University Michael J Rooks Cornell University Table of Contents 2 1 Introduction 2 1 1 Definition and historical perspective 2 1 2 Applications 2 1 3 Alternative techniques 2 2 Elements of electron optics 2 2 1 Introduction 2 2 2 Electron sources 2 2 3 Electron lenses 2 2 4 Other electron optical element |
PDF Manual | ENGLISH | |||||||||||
| # | Title | Type | Language | Download | ||||||||||
| 1. | Microlithography Chapter 2 E Beam Lithography b SPIE Handbook of Microlithography Micromachining and Microfabrication Volume 1 Microlithography Chapter 2 E Beam Lithography by Mark A McCord Stanford University Michael J Rooks Cornell University Table of Contents 2 1 Introduction 2 1 1 Definition and historical perspective 2 1 2 Applications 2 1 3 Alternative techniques 2 2 Elements of electron optics 2 2 1 Introduction 2 2 2 Electron sources 2 2 3 Electron lenses 2 2 4 Other electron optical element |
PDF Manual | ENGLISH |
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