UFNEF Alphastep 200 SOP Rev 1 0 Page of 1 Tencor Alphastep 200 Automatic Step Profiler Contents 1 Introduction 2 System Description 2 1 General 2 2 Specifications 2 3 Data Display 2 4 Keyboard 3 Operating Procedures 3 1 Setting Scan Parameters 3 2 Scanning a Sample 4 Manipulating Data 4 1 Overriding Vertical Auto Ranges 4 2 Measurement Cursors Measuring Profile Features 4 3 Leveling the Plot 4 4 Plotting Individual Profile Features Zoom 4 5 Averag
Basic Operation Chapter 4 describes the basic operation of the AlphaStep Development Series profiler instrument and software Included in this section are powering up the instrument loading and unloading a sample viewing and positioning with the video system and measuring a profile e Powering up the Instrument on page 50 e Loading the Sample on page 50 e Control Panel Tab on page 52 e Engaging the Stylus on page 56 e Magnifying the Sample Im