Tencor P1 Long Scan Profilometer POC Brian Morgan SYSTEM CHECK 1 2 3 Turn on monitor switch located under front of monitor The profilometer CPU should already be on and should not be turned on or off by anyone but the POC Ifthe CPU is found off or if the CPU must be restarted please notify the POC immediately One of two possible screens should be displayed either the MENU or the MOTION screen both of which will be described below Check tha
KLA Tencor Alpha Step IQ Surface Profiler 0084995 000 Rev AA COPYRIGHT NOTICE Copyright 2004 KLA Tencor Corporation All rights reserved KLA Tencor provides this documentation without warranty in any form either expressed or implied KLA Tencor may revise this document at any time without notice This document may contain proprietary information and shall be respected as a proprietary document with permission for review and usage given only to the rightful owne
UFNEF Alphastep 200 SOP Rev 1 0 Page of 1 Tencor Alphastep 200 Automatic Step Profiler Contents 1 Introduction 2 System Description 2 1 General 2 2 Specifications 2 3 Data Display 2 4 Keyboard 3 Operating Procedures 3 1 Setting Scan Parameters 3 2 Scanning a Sample 4 Manipulating Data 4 1 Overriding Vertical Auto Ranges 4 2 Measurement Cursors Measuring Profile Features 4 3 Leveling the Plot 4 4 Plotting Individual Profile Features Zoom 4 5 Averag