Matdev Lab Dox AET - Oregon State University

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1. Matdev Lab Dox AET - Oregon State University

Thursday January 30 2003 Home Matdev Lab Dox AET RTP AET THERMAL RTA SYSTEM OPERATION MANUAL FOR ANNEALING OF THIN FILMS By Paul Keir Sept 26 1996 and revised by Jeff Bender July 4 2001 Reference Persons Jeff Bender Randy Hoffman Department of Electrical and Computer Engineering Oregon State University 1 INTRODUCTION The AET THERMAL RX SERIES Rapid Thermal Annealing RTA system is a modern computer controlled annealing system The RTA 		PDF Manual ENGLISH


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1. Matdev Lab Dox AET - Oregon State University

Thursday January 30 2003 Home Matdev Lab Dox AET RTP AET THERMAL RTA SYSTEM OPERATION MANUAL FOR ANNEALING OF THIN FILMS By Paul Keir Sept 26 1996 and revised by Jeff Bender July 4 2001 Reference Persons Jeff Bender Randy Hoffman Department of Electrical and Computer Engineering Oregon State University 1 INTRODUCTION The AET THERMAL RX SERIES Rapid Thermal Annealing RTA system is a modern computer controlled annealing system The RTA 		PDF Manual ENGLISH


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