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NAQSServer Version 2.1 User Guide
NAQSServer Version 2 1 User Guide WW Nanometrics Kanata Ontario Canada 2004 2008 Nanometrics Inc All Rights Reserved NAQSServer Version 2 1 User Guide The information in this document has been carefully reviewed and is believed to be reliable for Version 2 1 Nanometrics Inc reserves the right to make changes at any time without notice to improve the reliability and function of the product No part of this publication may be reproduced stored in a retrieval system or transmitted in any form or by any means electronic mechanical photocopying recording or otherwise without the prior written permission of Nanometrics Inc Nanometrics Inc 250 Herzberg Road Kanata Ontario Canada K2K 2A1 Tel 1 613 592 6776 Fax 1 613 592 5929 Email info 9 nanometrics ca www nanometrics ca Part number 14826R4 Release date 2008 03 28 About This User Guide Document Scope This user guide provides instructions for installing configuring and running NAQSServer Chapter 1 Getting Started Installation instructions and an overview of the components and functionality of NAQSServer Chapter 2 Configuring NAQSServer Instructions on how to configure NAQSServer using the Naqs ini and Nags stn files Chapter 3 Running NAQSServer Information on stopping and starting NAQSServer using the run time commands and monitoring the operation of NAQSServer e Appendix A Configuration File Examples Examples of Naqs ini and Nags stn files Document Conventions Essential and Supplementary Information A Warning AN Caution A Note Links blue text Text Conventions bold text italic text courier text courier bold text A Warning is essential information that explains 1 a risk of injury or a risk of irreversible damage to data an operating system or equipment and 2 preventive action A Caution is essential information that explains 1 a risk of damage to equipment data or software where the recovery is likely to be troublesome and 2 preventive action A Note is an explanation or comment that is related to the main text but is not essential information An external link for example http www nanometrics ca A link to information within the document Buttons on the graphical user interface GUI Variables such as parameter names and value placeholders File names and paths for example nmx user trident rsp Input commands shown exactly as they must be entered at the prompt For example and then type mkdir SAPOLLO LOCATION config NAQSServer Version 2 1 User Guide 14826R4 2008 03 28 About This User Guide NAQSServer Version 2 1 User Guide IV 14826R4 2008 03 28 Contents About This User Guide DOCUMENT SCOPE iia kanaba Ret ERU Nn ND Md duce Re KENO RY Bre Ea EN dts iii Document GonventllOnS ceremonias a a a si dt aid eR Row oe s iii A A PITT xL viii Chapter 1 Get |
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