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Murata MEMS Evaluation Unit User Manual Murata MEMS Evaluation Unit User Manual Murata Electronics Oy Subject to changes 1 34 www murata com Doc Nr 82175700 Rev D muhata Murata MEMS Evaluation Unit User Manual TABLE OF CONTENTS T MT OGUG HON rroen E E E E E PETRA N S 4 2 Quick start for using the Murata MEMS Evaluation Unit 4 3 Hardware overvieW sssssssnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn