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Marvell Nanofabrication Laboratory University of California Berkeley Berkeley Microfabrication Laboratory ay Lab Manual HE Marvell NanoLab Member login Lab Manual Contents MercuryWeb Berkeley Microlab Chapter 8 52 Flexus Thin Film Stress Measurement flexus 380 1 0 Title Flexus Thin Film Stress Measurement 2 0 Purpose Flexus Tencor FLX 2320 is a thin film stress measurement instrument It accurately measures the changes in the radius of curvature of the su