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1. sp3 HFCVD Diamond Deposition Reactor

1 0 2 0 3 0 4 0 Marvell Nanofabrication Laboratory University of California Berkeley Lab Manual Chapter 6 25 Sp3 Model 655 Series HFCVD Diamond Deposition Reactor Sp3 595 Equipment Purpose 1 1 The Sp3 model 655 series hot filament CVD HFCVD diamond deposition reactor produces thin film polycrystalline diamond coatings on 4 and 6 Si wafers The hot filament technology allows deposition of high quality nano crystalline NCD and microcrystalli
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