Nanofabrication Facility PECVD SOP Rev 00 April 24 Author Charlie Yao amp Mario Beaudoin Email charlieyao egmail com Beaudoin physics ubc ca Phone 604 822 1853 MB Purpose This document outlines the standard operation for the Trion Plasma Enhanced Chemical Vapour Deposition PECVD device located in the AMPEL clean room It is written with respect to typical usage and does not attempt to describe every operation available It also describes basic failure mechanisms th
WASHINGTON NANOFABRICATION FACILITY User Manual Version 6 29 July 2015 UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING TABLE OF CONTENTS BERGEN CEN OI aac scsi anann ennnen ANAONA nsina ne spitalune shu neat A NAA Ninna ERARA AE 4 General Information sssssssussssuennsnununnnnnnnnnnnnnunnnnunnnnnunnnnannunnnnannnnnnnunnnnannannnnnnnnnn annan nnn ananman anann 5 Website and Contacts Using the Fea Cay ee Onsite USGrsisivadaincucsanitiiwiwad han i een icc ae
UNT Nanofabrication Cleanroom User s Manual University of North Texas Nanofabrication Facility EMERGENCY CONTACTS Primary Emergency Contact 911 Poison Control Center 800 222 1222 For Non Emergency Chemical Situations Department of Risk Management DRM 940 369 2123 If Time Permits Contact the Cleanroom Staff Dr Jianchao J C Li 940 369 5318 Emergency Response Checklist IF A TOXIC GAS LEAK OCCURS 1 Push a Yellow Gas Off button 2 Evacuate
WASHINGTON J TECHNOLOGY CENTER 3 ideas connections jobs HEALTH AND SAFETY PLAN Revision History April 23 2010 by PST August 10 2010 by PST February 01 2011 by PST TABLE OF CONTENTS A INTRODUCTION DEE 1 1 lee le 1 2 Health and Safety Bolten 1 3 Res oel E ST o EEEE TE Ee 1 4 Safety Coordinator nie er een een En RI TIN T MI 2 B FUNDAMENTALES 8 KEYS 5 rx od x ALAS LIS ERA GENE EE 2 1 New Employee Health and Safety Orientation 2 2 Emergency Evacuation