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1. Ami Pro - CHAP01.SAM

Chapter 1 Introduction 5 1 1 1 Fabrication CMOS integrated circuits are fabricated on thin circular slices of silicon called wafers Each wafer contains several individual chips or die Fig 1 2 For production purposes each die on a wafer is usually identical Added to the wafer are test structures and process monitor plugs sections of the wafer used to monitor process parameters A dice fabricated with other die on the silicon wafer Top Enlarged v
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