| # | Title | Type | Language | |||||||||||
| 1. | MJB4 Mask Aligner Operating Procedure NCMN Nebraska Center for Materials and Nanoscience University of Nebraska MJB4 Mask Aligner Operating Procedure Effective Date 07 12 2012 Author s Jiong Hua Phone 402 472 3773 Email jhua2 unl edu 1 Introduction 1 1 Key Words Karl Suss MJB4 Mask Aligner Optical Lithography Pattern Transfer 1 2 Purpose This document provides instructions for operating the MJB4 Mask Aligner which can transfer a pattern from a glass mask to a photoresist coated |
PDF Manual | ENGLISH | |||||||||||
| # | Title | Type | Language | Download | ||||||||||
| 1. | MJB4 Mask Aligner Operating Procedure NCMN Nebraska Center for Materials and Nanoscience University of Nebraska MJB4 Mask Aligner Operating Procedure Effective Date 07 12 2012 Author s Jiong Hua Phone 402 472 3773 Email jhua2 unl edu 1 Introduction 1 1 Key Words Karl Suss MJB4 Mask Aligner Optical Lithography Pattern Transfer 1 2 Purpose This document provides instructions for operating the MJB4 Mask Aligner which can transfer a pattern from a glass mask to a photoresist coated |
PDF Manual | ENGLISH |
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