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MICROFLUIDICS Microfluidic Facility Harvard Medical School Suss MJB3 Mask Aligner User Manual Important Notes 1 Don t turn off the lamp power 2 Don t turn off the machine power it will shut off the N2 to the lamp house therefore damage the lamp Do not use any type of tapes to cover the vacuum holes on substrate chuck Exposure dosage may vary from one machine to another 5 Contact staff immediately if anything unusual happens General Perspective C